FE-SEM

TESCAN CLARA

Ultra High-ResolutionScanning Electron Microscope (UHR SEM) – An ultra-high-resolution scanning electron microscope for the morphological characterization of materials and devices, achieving resolutions down to 0.9 nm at 15 kV and 1.6 nm at 1 kV. The instrument operates over an accelerating voltage range from 200 V to 30 kV, enabling high-resolution analysis even at low voltages. Its high depth of field and versatile imaging modes allow detailed observation of surfaces, thin films, nanostructures, and electron beam-sensitive materials, both conductive and non-conductive.

Microanalisi EDS (Oxford AZtec Live Standard with Ultim Max 170 SDD detector) – A system for the elemental analysis of materials using EDS spectroscopy, equipped with an SDD detector featuring an active area of 170 mm² and an energy resolution of 127 eV. It enables qualitative and quantitative analyses, elemental mapping, and concentration profiling, integrating morphological and compositional information at the micro- and nanoscale.